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The definition of IP or PVD plating:
Ion plating is a physical vapor deposition (PVD) process
that is sometimes called ion assisted deposition (IAD) or ion vapor deposition
(IVD) and is a version of vacuum deposition. Ion plating utilizes concurrent or
periodic bombardment of the substrate and depositing film by atomic-sized
energetic particles. Bombardment prior to deposition is used to sputter clean
the substrate surface. During deposition the bombardment is used to modify and
control the properties of the depositing film. It is important that the
bombardment be continuous between the cleaning and the deposition portions of
the process to maintain an atomically clean interface.
In ion plating the energy, flux and mass of the bombarding
species along with the ratio of bombarding particles to depositing particles
are important processing variables. The depositing material may be vaporized
either by evaporation, sputtering (bias sputtering), arc vaporization or by
decomposition of a chemical vapor precursor chemical vapor deposition - CVD.
The energetic particles used for bombardment are usually ions of an inert or
reactive gas, or, in some cases, ions of the condensing film material (“film
ions”). Ion plating can be done in a plasma environment where ions for
bombardment are extracted from the plasma or it may be done in a vacuum
environment where ions for bombardment are formed in a separate ion gun. The
latter ion plating configuration is often called Ion Beam Assisted Deposition
(IBAD). By using a reactive gas or vapor in the plasma, films of compound
materials can be deposited.
Ion plating is used to deposit hard coatings of compound
materials on tools, adherent metal coatings, optical coatings with high
densities, and conformal coatings on complex surfaces. The ion plating process was first described in the technical
literature by Donald M. Mattox of Sandia National Laboratories in 1964.